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日本YAMATO等离子清洗机[产品打印页面]

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产品名称: 日本YAMATO等离子清洗机

产品型号: PDC200/210/510

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简单介绍

日本YAMATO等离子清洗机PDC200/210/510 本产品是用等离子来进行表面处理的专业装置。桌台式，具有高性能，力求操作简便，快捷，可显示数据。广泛应用于以电子材料为中心的各个行业中。用途:用于CSP、BGA、COB、基板的等离子处理。消除有机膜，金属氧化膜。用于印刷电路板的干式清洗。界面活性处理。

日本YAMATO等离子清洗机 的详细介绍

日本YAMATO等离子清洗机 PDC200/210/510

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Model
200	210	510
Plasma Mode
RIE		RIE/DP
RIE : Reactive Ion Etching DP : Direct Plasma
High-frequency Output
Max.300W	Max.500W
Oscillating Frequency
13.56 MHz
Dimension of Stage(mm)
250×170		410×170

Purpose : Removal of Organic films, Surface cleaning, Surface reforming, Surface etching etc.

Despite being desktop models, they feature high performance, are simple to use, and can obtain data easily.
They are genuine RIE systems, and can be DP systems with the use of options.

Interior

Composition figure

Specifications

Model	PDC-200/210/510
Plasma Mode	PDC-200(RIE or DP) / PDC-210(RIE and DP)
Main Unit
Aluminum chamber	Internal dimension: 400mmW×250mmD×150mmH
Electrode	Parallel flat stage plate: 230mmW×170mmD
Vacuum gauge	Capacitance manometer
Reaction gas system	Two systems(Ar,O2)
Controller	Programmable controller
Display	LCD Touch panel Display
Radio-Frequency Power Supply
Input	PDC-200: AC 100V,Single phase, 8A (50/60 Hz) / PDC-210: AC 200V,Three phase, 15A (50/60 Hz)
Radio-frequency output power	PDC-200:300W / PDC-210:500W
Reference oscillator	Quartz oscillator
Oscillating frequency	13.56 MHz
Matching adjustment	Automatic tuning
Discharge System (Vacuum Pump) only PDC-210 / PDC200 Optional
Displacement	Total 345 liters/min.
Input power supply	Three phases, AC200V, 4A, 50/60 Hz / PDC-200 Single phase ,AC100V,4A,(50/60Hz)
Inlet configuration	NW25
Outlet configuration	NW25
Gas Systems
Purge gas	Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer
Reaction gas G1	Oxygen (O2) and a mass flow controller (500 secm) / PDC-200:(200 secm)
Reaction gas G2	Argon (Ar) and a mass flow controller (100 secm)
Safety Mechanisms
System Protections	(1) Watching Vacuum Pump and RF generater Watching over current by Thermal Protector Magnetic relay. (2) Product Quartz oscillator When Matching unit have miss matching,protect quartz oscillator. (3) Door Panel Inter lock Build Inter lock switch.
Actions against a trouble of the vacuum pump	The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump. The main valve closes The gas feed valve closes The isolation valve closes The oscillator stops outputting Treatment process is suspended The Alarm buzzer starts sounding *The treatment process timer stops.
REQUIRED UTILITIES
Power Supply
Main unit with vacuum pump	PDC-200: Single phases, AC100V, 15 A, 50/60Hz PDC-210: Three phases, AC200V, 15 A, 50/60Hz (with an accessory power cable of 3 meters long, and exposed crimp-style terminals of 8 millimeters long)
Gases
Purge gas	Nitrogen (N2) (Feed pressure: 2～7 kgf/cm2)
Reaction gas G1	Oxygen (O2) (Feed pressure: 1.5 kgf/cm2)
Reaction gas G2	Argon (Ar) (Feed pressure: 1.5 kgf/cm2)
Connection port	1/4" swagelok joint bulkhead union (SS-400-61)
	Note: Pressure regulators, filters and other protective devices shall be prepared by others.
Connection Diameter of the Discharge Duct (and inlet Port)
Vacuum pump's inlet port	NW25 (with a flexible stainless steel hose of 1 meter long)
Vacuum pump's outlet port	NW25
	Note: Every port has a connector designed for a flexible hose.

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