日本YAMATO等离子清洗机[产品打印页面]

如果您对该产品感兴趣的话,可以
产品名称: 日本YAMATO等离子清洗机
产品型号: V1000/V1000X/V1000XS
产品展商: 其它品牌
产品文档: 无相关文档

简单介绍
日本YAMATO等离子清洗机 V1000/V1000X/V1000XS 本产品是用等离子来进行表面处理的专业装置。具有高性能,力求操作简便,快捷,可显示数据。广泛应用于以电子材料为中心的各个行业中。用途:用于CSP、BGA、COB、基板的等离子处理。消除有机膜,金属氧化膜。用于印刷电路板的干式清洗。界面活性处理。

日本YAMATO等离子清洗机  的详细介绍

 

 

型号

V1000

V1000X

V1000XS

等离子工作模式

RIE and DP

RIE : 物理冲击型
DP :
化学反应型

高频、高周波输出功率

1000W

1000W/1500W

振荡频率

13.56 MHz

平台尺寸(mm)

280×280

300×300

400×375

控制器显示屏
V-1000 Control Display 

可编程控制器
(
触摸式操作屏)

 

工作室情况


V-1000X Chamber

用途:去除各种半导体材料表面的有机膜, 对材料表面清洗、重整,以及材料表面的蚀刻。

V-1000

 

V-1000 Open V-1500XS

 

规格说明:

型号

V-1000

V-1000X(双工作台)

V-1000XS

等离子工作模式

RIE and DP

主件

电极结构

平行平板式

平台尺寸

280mmW×280mmD

300mmW×300mmD(Double stage)

400mmW×375mmD

工作室尺寸

400mmW×400mmD×380mmH

400mmW×400mmD×380mmH

600mmW×554mmD×440mmH

真空测量

电容压力计

反应气体系统

双系统

控制器

Programmable controller

显示屏

Programmable terminal (touch panel)

射频能量供应

输入

AC 200/220/380V,Three phase,

高频输出功率

1,000W

1,000 & 1,500W

发振器

水晶发振

发振频率

13.56 MHz

匹配调节

自动调整

真空泵 (Vacuum Pump)

Displacement (置换量)

670 & 1,000 liters/min.

670 & 1,500 liters/min.

1,000 & 1,500 liters/min.

Inlet configuration(进口配置)

NW40 with a flexible stainless steel hose (1 meter long)

Outlet configuration(出口配置)

NW40

气体系统(Gas Systems

Purge gas(净化气体)

Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer

Driving gas(推进气体)

Air or nitrogen (N2) and a regulator (alarm contact at 10 kgf/cm2) with a manometer

Reaction gas G1(反应气体1

Oxygen (O2) and a mass flow controller (1000 secm)

Reaction gas G2(反应气体2

Argon (Ar) and a mass flow controller (100 secm)

Safety Mechanisms(**机构)

System Protections(系统保护)

*Oscillator protection circuit *Front-door interlock switch (interlocked with the startup)
*Safety switches (interlock switch on the side panels) *Vacuum leak test function
*Air-purge end buzzer *Alarm buzzer *Emergency stop push-button switch

Actions against a trouble of the vacuum pump(真空泵故障反应)

The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump.
*The main valve closes *The gas feed valve closes *The isolation valve closes
*The oscillator stops outputting *Treatment process is suspended *The Alarm buzzer starts sounding
* The alarm indicator lamp lights up to notify the trouble of the vacuum pump
*The treatment process timer stops

REQUIRED UTILITIES(必要的配套设施)

Power Supply(电源供应)

Main unit with vacuum pump

(配真空泵主机)

Three phases, AC220V, 30 A, 60Hz (with an accessory power cable of 3 meters long, and exposed crimp-style terminals of 8 millimeters long)

Gases(气体)

Driving gas (推进气体)

Air or nitrogen (N2) (Feed pressure: 57 kgf/cm2)

Purge gas(净化气体)

Nitrogen (N2) (Feed pressure: 27 kgf/cm2)

Reaction gas G1(反应气体1

Oxygen (O2) (Feed pressure: 1.5 kgf/cm2)

Reaction gas G2(反应气体2

Argon (Ar) (Feed pressure: 1.5 kgf/cm2)

Connection port(连接端口)

1/4" swagelok joint bulkhead union (SS-400-61)

 

Note: Pressure regulators, filters and other protective devices shall be prepared by others.

Connection Diameter of the Discharge Duct (and inlet Port)( 流注输送管口径)

Vacuum pump's inlet port

NW4O (with a flexible stainless steel hose of 1 meter long)

Vacuum pump's outlet port

NW4O

Main unit's ozone outlet port

163mm diameter

Oscillator's ventilation port

163mm diameter

 

Note: Every port has a connector designed for a flexible hose. Connect a duct to these inlet and outlet ports.

产品留言
标题
联系人
联系电话
内容
验证码
点击换一张
注:1.可以使用快捷键Alt+S或Ctrl+Enter发送信息!
2.如有必要,请您留下您的详细联系方式!
主营产品:鸟牌43型射频功率计日本德士TEXIODummy loadTOS5301日本菊水KIKUSUI鸟牌Bird功率计菊水TOS9301Bird RF Power SensorBird 4421ABird 5012DKIKUSUI TOS5302KIKUSUI TOS5200爱德万ADCMT半导体主机台功率校准系统BIRD 4304A型射频功率计

粤公网安备 44030902000440号